Determination of the parameters of the first coating layer using broadband optical monitoring of the deposition process. 2021, Vol. 76, No. 5, pp. 356–362, DOI: 10.3103/S002713492105009X

Isaev T.F., Lagutin Iu S., Lagutina A.A., Lukyanenko D.V., Prosovskiy O.F., Tikhonravov A.V., Yagola A.G.
Журнал
Moscow University Physics Bulletin
Опубликована
01.01.2021
journalRanking
0.54
URL_istina
http://istina.msu.ru/publications/article/416659243/